Enhancing the reliability of XPS spectra interpretation by microstructure analysis and self-consistent peak modelling: The case of W N (0 ≤ x ≤ 0.65)

The reliability of XPS spectra interpretation of heterogeneous materials exhibiting compositionally-driven phase transformations is shown to improve by a comprehensive sample analysis including characterization of microstructure, elemental composition, impurity level, and phase constitution. This approach is demonstrated here for a series of W 1-x N x films with N content varying in the range 0 ≤ x ≤ 0.65, which results in a complex evolution of W 4f spectra. The reliability of peak models is fu