A 255 nm UV LED array is evaluated as a direct replacement for a 248.7 nm mercury lamp in a production wafer edge exposure system, with results addressing performance, cost, and process compatibility in a real manufacturing environment. The post Production Evaluation of 255 nm UV LEDs as a Replacement for Mercury Lamps for Wafer Edge Exposure Processes appeared first on Semiconductor Digest .
Production Evaluation of 255 nm UV LEDs as a Replacement for Mercury Lamps for Wafer Edge Exposure Processes
Pete Singer